RF MEMS switch and fabrication method thereof

ABSTRACT

Disclosed are an RF MEMS switch and a fabrication method thereof. According to an embodiment the RF MEMS switch is actuated with a low voltage and a low consumption power by using a piezoelectric capacitor actuated by being converted to mechanical energy from electric energy when an electric field is applied to the piezoelectric capacitor. A cap substrate can be formed by using an etching method, a chemical mechanical polishing method, an electroplating method, etc., and the RF MEMS switch has a high reliability and a high yield.

This application is a Continuation of application Ser. No. 11/640,198filed on Dec. 18, 2006, which is a Divisional of application Ser. No.11/036,039 filed on Jan. 18, 2005, now U.S. Pat. No. 7,151,425 issued onDec. 19, 2006 and for which priority is claimed under 35 U.S.C. § 120.The present application also claims priority of Application No.10-2004-0003972 filed in Republic of Korea on Jan. 19, 2004 under 35U.S.C. § 119. The entire contents of all these applications are herebyincorporated by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to an RF MEMS switch and a fabricationmethod thereof, and more particularly, to an RF MEMS switch capable ofcontrolling an RF signal by using a piezoelectric capacitor and afabrication method thereof.

2. Description of the Conventional Art

As information communication develops recently, an informationcommunication electronic system is required to be small, light, andactuated in a high function. According to this, miniature componentswhich constitute the information communication electronic system arerequired to be developed. Among the miniature components, a radiofrequency micro-electromechanical system (RF MEMS) switch forcontrolling a system signal is being widely used.

Currently, an FET switch or a semiconductor switch such as a PIN diode,etc. is being widely used as a switch of information communicationsystem. However, the switches have many disadvantages such as a highpower loss, a distortion, and a non-linear characteristic at the time ofbeing actuated.

Also, the RF MEMS switch using an electrostatic force requires a highvoltage and has a low reliability in operation.

SUMMARY OF THE INVENTION

Therefore, an object of the present invention is to provide an RF MEMSswitch capable of being actuated with a low driving voltage and a lowconsumption power by using a piezoelectric capacitor and capable ofobtaining a high yield and a high reliability, and a fabrication methodthereof.

To achieve these and other advantages and in accordance with the purposeof the present invention, as embodied and broadly described herein,there is provided an RF MEMS switch comprising: a cap substrate havingvia holes at both sides thereof, the via hole provided with a connectionline; a transmission line having a first transmission line and a secondtransmission line spaced from each other with a certain gap at a lowersurface of the cap substrate; a ground line formed at both sides of thetransmission line; a connection pad formed at an upper surface of thecap substrate, and electrically connected to the transmission line andthe ground line by the connection line; a bottom substrate having acertain gap from the cap substrate; a piezoelectric capacitor formed atone side of a suspension layer formed at an upper surface of the bottomsubstrate, and actuated with a piezoelectric characteristic by receivingan external power; and a contact electrode formed at another side of thesuspension layer and moved up and down by a displacement of thepiezoelectric capacitor, for selectively turning on/off RF signals ofthe first signal transmission line and the second signal transmissionline.

To achieve these and other advantages and in accordance with the purposeof the present invention, as embodied and broadly described herein,there is also provided a fabrication method of an RF MEMS switchcomprising: sequentially forming a first suspension layer of a siliconnitride and a second suspension layer of a silicon oxide on an uppersurface of a bottom substrate, and forming a piezoelectric capacitorcomposed of a first electrode layer, a piezoelectric layer, and a secondelectrode at one side of an upper surface of the second suspensionlayer; forming a contact electrode at another side of the upper surfaceof the second suspension layer; etching the first suspension layer andthe second suspension layer of the rest region except the piezoelectriccapacitor and the contact electrode; etching a part of the bottomsubstrate to release a gap between the first suspension layer and thebottom substrate, thereby completing the bottom substrate; etching acenter part of a lower surface of a cap substrate to form a groove;forming via holes at both sides of the cap substrate and filling a metalin the via hole, thereby forming a connection line; forming a signaltransmission line and a ground line at an upper surface of the capsubstrate; forming a connection pad at the lower surface of the capsubstrate; electrically connecting the signal transmission line and theground line to the connection pad by the connection line, therebycompleting the cap substrate; and bonding the cap substrate to the uppersurface of the bottom substrate with a certain gap by using a bump.

According to a second embodiment of the present invention, there isprovided an RF MEMS switch comprising: a cap substrate having via holesat both sides thereof, the via hole provided with a connection line; asignal transmission line formed at a lower surface of the cap substrate;a ground line formed at both sides of the signal transmission line; aconnection pad corresponding to the signal transmission line and formedat an upper surface of the cap substrate so as to be electricallyconnected to the signal transmission line and the ground line by theconnection line; a bottom substrate having a certain gap from the capsubstrate; a piezoelectric capacitor formed at one side of a suspensionlayer formed at an upper surface of the bottom substrate with a firstmetal layer thereof being exposed, and actuated with a piezoelectriccharacteristic by receiving an external power; and a capacitor contactelectrode formed at another side of the suspension layer and connectedto the exposed first metal layer, for selectively turning on/off an RFsignal of the signal transmission line by being moved up and down by adisplacement of the piezoelectric capacitor.

According to a second embodiment of the present invention, there is alsoprovided a fabrication method of an RF MEMS switch comprising:sequentially forming a first suspension layer of a silicon nitride and asecond suspension layer of a silicon oxide on an upper surface of abottom substrate, and forming a piezoelectric capacitor composed of afirst electrode layer, a piezoelectric layer, and a second electrode atone side of an upper surface of the second suspension layer; patterningthe second electrode layer and the piezoelectric layer and then etchingso that a part of the first electrode layer can be exposed; forming acapacitor contact electrode at another side of the upper surface of thesecond suspension layer so that the exposed part of the first electrodelayer can be covered; etching the first suspension layer and the secondsuspension layer of the rest region except the piezoelectric capacitorand the contact electrode; etching a part of the bottom substrate torelease a gap between the first suspension layer and the bottomsubstrate, thereby completing the bottom substrate; etching a centerpart of a lower surface of a cap substrate to form a groove; forming viaholes at both sides of the cap substrate and filling a metal in the viahole, thereby forming a connection line; forming a signal transmissionline and a ground line at an upper surface of the cap substrate; forminga connection pad at the lower surface of the cap substrate; electricallyconnecting the signal transmission line and the ground line to theconnection pad by the connection line, thereby completing the capsubstrate; and bonding the cap substrate to the upper surface of thebottom substrate with a certain gap by using a bump.

The foregoing and other objects, features, aspects and advantages of thepresent invention will become more apparent from the following detaileddescription of the present invention when taken in conjunction with theaccompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings, which are included to provide a furtherunderstanding of the invention and are incorporated in and constitute apart of this specification, illustrate embodiments of the invention andtogether with the description serve to explain the principles of theinvention.

In the drawings:

FIG. 1 is a perspective view showing an operation of a piezoelectriccapacitor using a piezoelectric power;

FIG. 2 is a schematic diagram showing a structure of a resistive type RFMEMS switch;

FIG. 3 is an equivalent circuit showing the structure of the resistivetype RF MEMS switch;

FIG. 4 is a construction view showing a capacity type RF MEMS switch;

FIG. 5 is a circuit showing a structure of a resistive type RF MEMSswitch;

FIG. 6 is a perspective view showing an RF MEMS switch according to afirst embodiment of the present invention;

FIG. 7 is a longitudinal section view showing the RF MEMS switchaccording to the first embodiment of the present invention;

FIG. 8 is a longitudinal section view taken along line I-I of FIG. 7;

FIG. 9 is a plane view showing a bottom substrate of the RF MEMS switchaccording to the first embodiment of the present invention;

FIG. 10 is a plane view showing another example of the bottom substrateof the RF MEMS switch according to the first embodiment of the presentinvention;

FIG. 11 is a plane view showing still another example of the bottomsubstrate of the RF MEMS switch according to the first embodiment of thepresent invention;

FIGS. 12A to 12K are section views showing a fabrication process of anRF MEMS switch according to a first embodiment of the present invention;

FIGS. 13A to 13F are section views showing a process for fabricating acap substrate in the fabrication process of the MEMS switch according tothe first embodiment of the present invention;

FIG. 14 is a perspective view showing an RF MEMS switch according to asecond embodiment of the present invention;

FIG. 15 is a longitudinal section view showing the RF MEMS switchaccording to the second embodiment of the present invention;

FIG. 16 is a longitudinal section view taken along line II-II of FIG.15;

FIG. 17 is a plane view showing a bottom substrate in the RF MEMS switchaccording to the second embodiment of the present invention;

FIG. 18 is a plane view showing another example of the bottom substratein the RF MEMS switch according to the second embodiment of the presentinvention;

FIG. 19 is a plane view showing still another example of the bottomsubstrate in the RF MEMS switch according to the second embodiment ofthe present invention; and

FIGS. 20A to 20L are section views showing a fabrication process of theRF MEMS switch according to the second embodiment of the presentinvention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

Reference will now be made in detail to the preferred embodiments of thepresent invention, examples of which are illustrated in the accompanyingdrawings.

Hereinafter, an RF MEMS switch and a fabrication method thereofaccording to the present invention will be explained. To this end, anoperation of a piezoelectric capacitor that serves as a piezoelectricactuating unit using a piezoelectric power, and structures of aresistive type RF MEMS switch and a capacity type RF MEMS switch will beexplained in brief.

FIG. 1 is a perspective view showing an operation of a piezoelectriccapacitor using a piezoelectric power.

As shown, a piezoelectric capacitor 160 is formed on a suspension layer151. The piezoelectric capacitor 160 has a structure that apiezoelectric body 162 is formed between an upper electrode 163 and alower electrode 161.

When a power is applied to the upper electrode 163 and the lowerelectrode 161, the piezoelectric body 162 is contracted or expandedthereby to be displaced as much as “h” upwardly. The “h” is determinedby a thickness ratio of the suspension layer 151 and a piezoelectricconstant of the piezoelectric body 162. When PZT such as Pb(Zr(Zr, Ti)O₃is used, power applied to the piezoelectric body 162 can be lowered, thepiezoelectric body is smoothly actuated, and a fast switching speed canbe obtained.

FIG. 2 is a schematic diagram showing a structure of a resistive type RFMEMS switch, and FIG. 3 is an equivalent circuit showing the structureof the resistive type RF MEMS switch.

As shown, a contact electrode 170 is moved up and down by thedisplacement of the piezoelectric body 160, thereby turning on/off afirst signal line 121 and a second signal line 122 spaced from eachother with a certain gap. According to this, an RF signal flowing to thefirst signal line 121 and the second signal line 122 is controlled.

The first signal line 121 denotes an RF inline, and the second signalline 122 denotes an RF outline.

When the piezoelectric capacitor is operated, an RF signal is turned onand vice versa.

FIG. 4 is a construction view showing a capacity type RF MEMS switch,and FIG. 5 is a circuit showing a structure of a resistive type RF MEMSswitch.

As shown, a capacitor contact electrode 270 connected to thepiezoelectric capacitor 160 and composed of a first metal layer, adielectric layer, and a second metal layer is spaced from a signaltransmission line 220 with a certain gap.

When a power is applied to the piezoelectric capacitor 160, thepiezoelectric body 162 is contracted or expanded thereby to be displacedas much as “h” upwardly. At this time, the capacitor contact electrode270 is moved and served as a variable capacitor. According to this, acapacitor is increased towards a ground line (not shown), therebyturning off an RF signal flowing to the signal transmission line 220.When the piezoelectric capacitor 160 is operated, an RF signal is turnedoff and vice versa.

In the RF MEMS switch and the fabrication method thereof according tothe present invention, an RF signal can be fast and easily controlled byusing a piezoelectric capacitor actuated as electric energy thereof isconverted into mechanical energy when an electric field is appliedthereto.

According to this, the RF MEMS switch of the present invention can beactuated with a voltage lower than 5V by using a piezoelectric power,and the RF MEMS switch can obtain a high reliability, a low voltageloss, and a fast switching speed.

Hereinafter, an RF MEMS switch and a fabrication method thereofaccording to the present invention will be explained with reference tothe attached drawings.

FIG. 6 is a perspective view showing an RF MEMS switch according to afirst embodiment of the present invention, FIG. 7 is a longitudinalsection view showing the RF MEMS switch according to the firstembodiment of the present invention, FIG. 8 is a longitudinal sectionview taken along line I-I of FIG. 7, and FIG. 9 is a plane view showinga bottom substrate of the RF MEMS switch according to the firstembodiment of the present invention.

As shown, an RF MEMS switch 100 according to the first embodiment of thepresent invention comprises: a cap substrate 110 having via holes 111 atboth sides thereof, the via hole 111 provided with a connection line112; a signal transmission line 120 formed at a lower surface of the capsubstrate 110, and having a first signal transmission line 121 and asecond signal transmission line 122 spaced from each other with acertain gap; a ground line 130 formed at both sides of the signaltransmission line 120; a connection pad 140 formed at an upper surfaceof the cap substrate 110, and electrically connected to the signaltransmission line 120 and the ground line 130 by the connection line112; a bottom substrate 150 having a certain gap from the cap substrate110; a piezoelectric capacitor 160 formed at one side of a suspensionlayer 151 formed at an upper surface of the bottom substrate 150, andactuated with a piezoelectric characteristic when an external power isapplied thereto; and a contact electrode 170 formed at another side ofthe suspension layer 151, for selectively turning on/off RF signals ofthe first signal transmission line 121 and the second signaltransmission line 122 by being moved up and down by a displacement ofthe piezoelectric capacitor 160.

The cap substrate 110 is formed as one signal transmission line 120 thatconnects an input terminal to an output terminal and two ground lines130 are deposited on a silicon or a glass by a plating method.

A bump 180 is formed between the cap substrate 110 and the bottomsubstrate 150 in order to maintain a certain gap between the capsubstrate 110 and the bottom substrate 150. As the bump 180, a solderbump or an organic bump can be used.

The contact electrode 170 has a basic structure of Ti/Au or Cr/Au for alow resistance and an excellent bonding with the suspension layer. Inorder to prevent a contact part between the contact electrode and thesignal transmission line from being adhered to each other during anoperation or in order to prevent a surface of the contact electrode frombeing damaged, Mo, W, and Ir for a high mechanical intensity and meltingpoint can be thinly deposited.

That is, the contact electrode 170 preferably has one structure ofTi/Au/Mo, Cr/Au/Mo, Ti/Au/W, Cr/Au/W, Ti/Au/Ir, and Cr/Au/Ir.

The piezoelectric capacitor 160 is composed of a first metal layer 161,a piezoelectric layer 162, and a second metal layer 163. Preferably, thepiezoelectric layer 162 is Pb(Zr, Ti) and a ratio between the Zr and Tiis 6:4.

FIG. 10 is a plane view showing another example of the bottom substrateof the RF MEMS switch according to the first embodiment of the presentinvention, and FIG. 11 is a plane view showing still another example ofthe bottom substrate of the RF MEMS switch according to the firstembodiment of the present invention.

As shown in FIG. 10, in a bottom substrate 150 a, four piezoelectriccantilevers 151 a support a square contact electrode 170 a.

As shown in FIG. 11, in a bottom substrate 150 b, four piezoelectriccantilevers 151 b support a square contact electrode 170 b.

As the contact electrodes 170 a and 170 b move in parallel with thebottom substrates 150 a and 150 b, a contact area between theaforementioned signal transmission line (not shown) and each contactelectrode 170 a and 170 b becomes wider and thereby an RF signal can bemore efficiently controlled.

In the RF MEMS switch 100 according to the first embodiment of thepresent invention, when power is supplied to the RF MEMS switch throughthe second metal layer 163, the suspension layer 151 that serves as acantilever is deformed. At this time, the contact electrode 170 connectsthe first signal transmission line 121 and the second signaltransmission line 122, thereby turning on the RF MEMS switch. On thecontrary, when a power supply to the RF MEMS switch 100 is cut off, thedeformed suspension layer 151 is restored to the original state, therebyturning off the RF MEMS switch.

FIGS. 12A to 12K are section views showing a fabrication process of anRF MEMS switch according to a first embodiment of the present invention.

A fabrication method of an RF MEMS switch according to a firstembodiment of the present invention comprises: sequentially forming afirst suspension layer of a silicon nitride and a second suspensionlayer of a silicon oxide on an upper surface of a bottom substrate, andforming a piezoelectric capacitor composed of a first electrode layer, apiezoelectric layer, and a second electrode at one side of an uppersurface of the second suspension layer; forming a contact electrode atanother side of the upper surface of the second suspension layer;etching the first suspension layer and the second suspension layer ofthe rest region except the piezoelectric capacitor and the contactelectrode; etching a part of the bottom substrate to release a gapbetween the first suspension layer and the bottom substrate, therebycompleting the bottom substrate; etching a center part of a lowersurface of a cap substrate to form a groove; forming via holes at bothsides of the cap substrate and filling a metal in the via hole, therebyforming a connection line; forming a signal transmission line and aground line at an upper surface of the cap substrate; forming aconnection pad at the lower surface of the cap substrate; electricallyconnecting the signal transmission line and the ground line to theconnection pad by the connection line, thereby completing the capsubstrate; and bonding the cap substrate to the upper surface of thebottom substrate with a certain gap by using a bump.

As shown in FIG. 12A, a first suspension layer 152 of a silicon nitrideand a second suspension layer 153 of a silicon oxide are sequentiallyformed on an upper surface of a bottom substrate 150. Also, suspensionlayers 154 and 155 of a silicon nitride are formed on a lower surface ofthe bottom substrate 150. Then, a piezoelectric capacitor 160 composedof a first electrode layer 161, a piezoelectric layer 162, and a secondelectrode layer 163 is formed at one side of an upper surface of thesecond suspension layer 153. Preferably, the first suspension layer 152and the second suspension layer 153 are deposited on the upper surfaceof the bottom substrate 150 by using a low pressure chemical vapordeposition method.

As shown in FIG. 12B, a part of the piezoelectric capacitor 160 ispatterned and then etched, thereby removing unnecessary parts thereof.

As shown in FIG. 12C, a contact electrode 170 is formed at another sideof the upper surface of the second suspension layer 153.

As shown in FIG. 12D, the first suspension layer 152 and the secondsuspension layer 153 of the rest region except the piezoelectriccapacitor and the contact electrode are etched.

As shown in FIG. 12E, a part 157 of the bottom substrate 150 is etchedto release a gap between the first suspension layer 152 and the bottomsubstrate 150, thereby completing the bottom substrate 150.

In the step for completing the bottom substrate, a wet etching ispreferably performed by using one of KOH, hydrofluoric nitric acetic(HNA), tetra methyl ammonium hydroxide (TMAH), ethylene diaminepyrocatechol (EDP), and NaOH.

As shown in FIG. 12F, a center part of a lower surface of a mothersubstrate to be served as a cap substrate 110 is etched, thereby forminga groove 113.

Preferably, the groove of the cap substrate is formed by using one of aplasma dry etching method, a sand blaster, or a laser cutting method.

As shown in FIGS. 12G to 12I, a via hole 111 is formed at both sides ofthe cap substrate 110, and a rear surface of the cap substrate 110 ispolished until the via hole 111 is exposed by using a chemicalmechanical polishing method. Then, metal such as gold, copper, or silveris filled in the via hole 111 by using an electro-analysis or a metalpaste, thereby forming a connection line 112.

As shown in FIG. 12J, a signal transmission line 120, a ground line 130(referring to FIG. 12K), and a connection pad 140 are sequentiallypatterned to be deposited on the lower surface of the cap substrate 110.

The signal transmission line 120 and the ground line 130 areelectrically connected to the connection pad 140 by the connection line112, thereby completing the cap substrate 110.

As shown in FIG. 12K, the cap substrate 110 is bonded to the uppersurface of the bottom substrate 150 by using a bump 180, therebycompleting the RF MEMS switch 100. Herein, the gap between the contactelectrode and the signal transmission line approximately corresponds toa sum between the height of the bump and the height of the etched partof the cap substrate.

Although not shown, it is preferable that the ground line of thepiezoelectric capacitor and the ground line of the cap substrate areindependently constructed in order to control the gap between the signaltransmission line and the contact electrode.

FIGS. 13A to 13F are section views showing a process for fabricating acap substrate in the fabrication process of the MEMS switch according tothe first embodiment of the present invention.

As shown in FIG. 13A, both parts of a lower surface of a mothersubstrate to be served as a cap substrate 110′ are etched, therebyforming a groove 113′.

The groove 113′ of the cap substrate 110′ is formed by using one of aplasma dry etching method, a sand blaster, or a laser cutting method.

As shown in FIGS. 13B to 13D, a via hole 111′ is formed at both sides ofthe cap substrate 110′, and metal is filled in the via hole 111′ therebyto form a connection line 112′. The lower surface of the cap substrate110′ is polished by using a chemical mechanical polishing method,thereby forming the via hole 111′.

As shown in FIGS. 13E to 13F, a signal transmission line 120′, a groundline 130′, and a connection pad 140′ are sequentially patterned to bedeposited on a lower surface of the cap substrate 110′. Then, the signaltransmission line 120′ and the ground line 130′ are electricallyconnected to the connection pad 140′ by the connection line 112′,thereby completing the cap substrate 110′.

In the above process, both sides of the lower surface of the capsubstrate 110′ are etched to form the groove 113′ and thereby the centerpart of the cap substrate 110′ is downwardly protruded. According tothis, when the RF MEMS switch is completed, the gap between the contactelectrode and the signal transmission line is minimized.

FIG. 14 is a perspective view showing an RF MEMS switch according to asecond embodiment of the present invention, FIG. 15 is a longitudinalsection view showing the RF MEMS switch according to the secondembodiment of the present invention, FIG. 16 is a longitudinal sectionview taken along line II-II of FIG. 15, and FIG. 17 is a plane viewshowing a bottom substrate in the RF MEMS switch according to the secondembodiment of the present invention.

As shown, an RF MEMS switch 200 according to the second embodiment ofthe present invention comprises: a cap substrate 210 having via holes211 at both sides thereof, the via hole 211 provided with a connectionline 212; a signal transmission line 220 formed at a lower surface ofthe cap substrate 210; a ground line 230 formed at both sides of thesignal transmission line 220; a connection pad 240 corresponding to thesignal transmission line 220 and formed at an upper surface of the capsubstrate 210 so as to be electrically connected to the signaltransmission line 220 and the ground line 230 by the connection line212; a bottom substrate 250 having a certain gap from the cap substrate210; a piezoelectric capacitor 260 formed at one side of a suspensionlayer 251 formed at an upper surface of the bottom substrate 250 with apart of a first metal layer 261 being exposed, and actuated with apiezoelectric characteristic when an external power is applied thereto;and a capacitor contact electrode 270 formed at another side of thesuspension layer 251 and connected to the exposed first metal layer 261,for selectively turning on/off an RF signal of the signal transmissionline 220 by being moved up and down by a displacement of thepiezoelectric capacitor 260.

The piezoelectric capacitor 260 is formed as a first metal layer 261, adielectric layer 262, and a second metal layer 263 are sequentiallydeposited. A part of the first metal layer 261 is exposed to outside.

The capacitor contact electrode 270 preferably has a deposited structurecomposed of a first metal layer 271, a dielectric layer 272, and asecond metal layer 273.

The capacitor contact electrode 270 has a basic structure of Ti/Au orCr/Au for a low resistance and an excellent bonding with the suspensionlayer. In order to prevent a contact part between the contact electrodeand the signal transmission line from being adhered to each other duringan operation or in order to prevent a surface of the contact electrodefrom being damaged, Mo, W, and Ir for a high mechanical intensity andmelting point can be thinly deposited.

That is, the capacitor contact electrode 270 preferably has onestructure of Ti/Au/Mo, Cr/Au/Mo, Ti/Au/W, Cr/Au/W, Ti/Au/Ir, andCr/Au/Ir.

The suspension layer 251 can be formed as a second suspension layer 253of a silicon oxide is deposited on a first suspension layer 252 of asilicon nitride, as a second suspension layer 253 of a silicon oxide isdeposited on a first suspension layer 252 of a silicon oxide, or as asecond suspension layer 253 of a silicon nitride is deposited on a firstsuspension layer 252 of a silicon nitride.

Referring to FIG. 17, the second metal layer 272 of the capacitorcontact electrode 270 is connected to the piezoelectric capacitor 260 bythe first metal layer 261, thereby turning off the RF MEMS switch byflowing an RF signal to the ground line 230 when the capacitor contactelectrode 270 is connected to the signal transmission line 220.

FIG. 18 is a plane view showing another example of the bottom substratein the RF MEMS switch according to the second embodiment of the presentinvention, and FIG. 19 is a plane view showing still another example ofthe bottom substrate in the RF MEMS switch according to the secondembodiment of the present invention.

As shown in FIG. 18, a second metal layer (not shown) of a squarecapacitor contact electrode 270 a is connected to a piezoelectriccapacitor 260 a by a first metal layer 261 a.

As shown in FIG. 19, a second metal layer (not shown) of a capacitorcontact electrode 270 b having a diamond shape is connected to apiezoelectric capacitor 260 b by a first metal layer 261 b.

In the RF MEMS switch 200 according to the second embodiment of thepresent invention, when power is supplied to the RF MEMS switch throughthe second metal layer 263, the suspension layer 251 that serves as acantilever is deformed. At this time, the capacitor contact electrode270 serves as a variable capacitor thereby to ground an RF signalflowing to the signal transmission line 220, thereby turning off the RFMEMS switch. On the contrary, when a power supply to the RF MEMS switchis cut off, the deformed suspension layer 251 is restored to theoriginal state and thereby the RF MEMS switch is turned on.

FIGS. 20A to 20L are section views showing a fabrication process of theRF MEMS switch according to the second embodiment of the presentinvention.

According to a second embodiment of the present invention, there is alsoprovided a fabrication method of an RF MEMS switch comprising:sequentially forming a first suspension layer of a silicon nitride and asecond suspension layer of a silicon oxide on an upper surface of abottom substrate, and forming a piezoelectric capacitor composed of afirst electrode layer, a piezoelectric layer, and a second electrode atone side of an upper surface of the second suspension layer; patterningthe second electrode layer and the piezoelectric layer and then etchingso that a part of the first electrode layer can be exposed; forming acapacitor contact electrode at another side of the upper surface of thesecond suspension layer so that the exposed part of the first electrodelayer can be covered; etching the first suspension layer and the secondsuspension layer of the rest region except the piezoelectric capacitorand the contact electrode; etching a part of the bottom substrate torelease a gap between the first suspension layer and the bottomsubstrate, thereby completing the bottom substrate; etching a centerpart of a lower surface of a cap substrate to form a groove; forming viaholes at both sides of the cap substrate and filling a metal in the viahole, thereby forming a connection line; forming a signal transmissionline and a ground line at an upper surface of the cap substrate; forminga connection pad at the lower surface of the cap substrate; electricallyconnecting the signal transmission line and the ground line to theconnection pad by the connection line, thereby completing the capsubstrate; and bonding the cap substrate to the upper surface of thebottom substrate with a certain gap by using a bump.

Hereinafter, a fabrication method of an RF MEMS switch according to asecond embodiment of the present invention will be explained withreference to FIGS. 20A to 20L.

As shown in FIG. 20A, a first suspension layer 252 of a silicon nitrideand a second suspension layer 253 of a silicon oxide are sequentiallyformed on an upper surface of a bottom substrate 250. Then, apiezoelectric capacitor 260 composed of a first electrode layer 261, apiezoelectric layer 262, and a second electrode layer 263 is formed atone side of an upper surface of the second suspension layer 253.

As shown in FIGS. 20B and 20C, the piezoelectric layer 262 and thesecond electrode layer 263 are patterned and then etched so that a partof the first electrode layer 261 can be exposed.

As shown in FIG. 20D, a capacitor contact electrode 270 is formed atanother side of the upper surface of the second suspension layer 253 sothat the exposed part of the first electrode layer 261 can be covered.

As shown in FIG. 20E, the first suspension layer 252 and the secondsuspension layer 253 of the rest region except the piezoelectriccapacitor 260 and the capacitor contact electrode 270 are etched.

As shown in FIG. 20F, a part 257 of the bottom substrate 250 is etchedto release a gap between the first suspension layer 252 and the bottomsubstrate 250, thereby completing the bottom substrate 250.

As shown in FIG. 20G, a center part of a lower surface of a mothersubstrate to be served as a cap substrate 210 is etched, thereby forminga groove 213.

Preferably, the groove of the cap substrate is formed by using one of aplasma dry etching method, a sand blaster, or a laser cutting method.

As shown in FIGS. 20H to 20J, a via hole 211 is formed at both sides ofthe cap substrate 210, and then a metal is filled in the via hole 211,thereby forming a connection line 212. The via hole 211 is formed bypolishing the lower surface of the cap substrate 210 with a chemicalmechanical polishing method.

As shown in FIG. 20K, a signal transmission line 220, a ground line 230(referring to FIG. 20L), and a connection pad 240 are formed on thelower surface of the cap substrate 210.

The signal transmission line 220 and the ground line 230 areelectrically connected to the connection pad 240 by the connection line212, thereby completing the cap substrate 210.

As shown in FIG. 20L, the cap substrate 210 is bonded to the uppersurface of the bottom substrate 250 by using a bump 280, therebycompleting the RF MEMS switch 200.

In the step for completing the bottom substrate 250 by etching the part257 of the bottom substrate 250 and thereby releasing the gap betweenthe first suspension layer 252 and the bottom substrate 250, a wetetching is preferably performed by using one of KOH, HNA, TMAH, EDP,NaOH, and XeF₂ gas phase.

Preferably, in the step for forming the groove of the cap substrate, oneof a plasma dry etching method, a sand blaster, or a laser cuttingmethod is preferably used.

In the step for forming via holes at both sides of the cap substrate andthen filling a metal in the via hole thereby to form a connection line,the lower surface of the cap substrate is polished by using a chemicalmechanical polishing method.

As aforementioned, the RF MEMS switch according to the present inventioncan be actuated with a low voltage and a low consumption power by usinga piezoelectric capacitor, thereby having a high reliability and a highyield.

As the present invention may be embodied in several forms withoutdeparting from the spirit or essential characteristics thereof, itshould also be understood that the above-described embodiments are notlimited by any of the details of the foregoing description, unlessotherwise specified, but rather should be construed broadly within itsspirit and scope as defined in the appended claims, and therefore allchanges and modifications that fall within the metes and bounds of theclaims, or equivalence of such metes and bounds are therefore intendedto be embraced by the appended claims.

1. An RF MEMS switch, comprising: a cap substrate; a bottom substratehaving a certain gap from the cap substrate; a signal transmission lineconstituted with a single signal transmission line, and disposed at thecap substrate; a connection line disposed at the cap substrate, andconnected with the signal transmission line; and an on/off meansdisposed at the bottom substrate, and turning on/off the signaltransmission line for transmitting signal, wherein the on/off meanscomprises; one or more piezoelectric capacitors disposed at the bottomsubstrate, and actuated with a piezoelectric characteristic by receivingan external power; and a capacitor contact electrode connected with afirst metal layer protruding from the piezoelectric capacitor, wherein aground line is formed adjacent to the signal transmission line andelectrically connected to the signal transmission line by the connectionline.
 2. The RF MEMS switch of claim 1, wherein a solder bump is formedbetween the cap substrate and the bottom substrate in order to maintaina certain gap between the cap substrate and the bottom substrate.
 3. TheRF MEMS switch of claim 1, wherein an organic bump is formed between thecap substrate and the bottom substrate in order to maintain a certaingap between the cap substrate and the bottom substrate.
 4. The RF MEMSswitch of claim 1, wherein a groove is formed at a center part of thelower surface of the cap substrate.
 5. The RF MEMS switch of claim 1wherein the capacitor contact electrode has a deposited structurecomposed of a first metal layer, a dielectric layer and a second metallayer, and the piezoelectric capacitor is composed of a first metallayer, a piezoelectric layer and a second metal layer.
 6. The RF MEMSswitch of claim 1 wherein the signal transmission line is electricallyconnected to a connection pad by the connection line.
 7. The RF MEMSswitch of claim 1, wherein the first metal layer poisoned between thecapacitor contact electrode and the piezoelectric capacitor has a widtha narrower than a width of the other position.
 8. The RF MEMS switch ofclaim 1 wherein the first metal layer positioned between the capacitorcontact electrode and the piezoelectric capacitor is formed to have awire type.
 9. An RF MEMS switch, comprising: a cap substrate; a bottomsubstrate having a certain gap from the cap substrate; a signaltransmission line constituted with a single signal transmission line,and disposed at the cap substrate; a connection line disposed at the capsubstrate, and connected with the signal transmission line; and anon/off means disposed at the bottom substrate, and turning on/off thesignal transmission line for transmitting signal, wherein the on/offmeans comprises; one or more suspension layers disposed at the bottomsubstrate; one or more piezoelectric capacitors disposed at thesuspension layers, and actuated with a piezoelectric characteristic byreceiving an external power; and a capacitor contact electrode disposedat the suspension layer, and connected with a first metal layerprotruding from the piezoelectric capacitor, wherein a ground line isformed adjacent to the signal transmission line and electricallyconnected to the signal transmission line by the connection line. 10.The RF MEMS switch of claim 9, wherein a solder bump is formed betweenthe cap substrate and the bottom substrate in order to maintain acertain gap between the cap substrate and the bottom substrate.
 11. TheRF MEMS switch of claim 9 wherein an organic bump is formed between thecap substrate and the bottom substrate in order to maintain a certaingap between the cap substrate and the bottom substrate.
 12. The RF MEMSswitch of claim 9, wherein a groove is formed at a center part of thelower surface of the cap substrate.
 13. The RF MEMS switch of claim 9wherein the capacitor contact electrode has a deposited structurecomposed of a first metal layer, a dielectric layer and a second metallayer, and the piezoelectric capacitor is composed of a first metallayer, a piezoelectric layer and a second metal layer.
 14. The RF MEMSswitch of claim 9 wherein the signal transmission line is electricallyconnected to a connection pad by the connection line.
 15. The RF MEMSswitch of claim 9 wherein the capacitor contact electrode and thepiezoelectric capacitor are formed on the same side of the suspensionlayer.
 16. The RF MEMS switch of claim 9 wherein the capacitor contactelectrode is connected to the piezoelectric capacitor by the first metallayer of the piezoelectric capacitor and/or the suspension layer. 17.The RF MEMS switch of claim 10 wherein the first metal layer of thepiezoelectric capacitor and/or the suspension layer positioned betweenthe capacitor contact electrode and the piezoelectric capacitor have awidth narrower than a width of the other position.
 18. The RF MEMSswitch of claim 10 wherein the first metal layer of the piezoelectriccapacitor and/or the suspension layer positioned between the capacitorcontact electrode and the piezoelectric capacitor are formed to have awire type.
 19. An RF MEMS switch, comprising: a signal transmission linehaving a first signal transmission line and a second signal transmissionline electrically separated from each other for transmitting a signal;and an on/off means for turning on/off the signal transmission line,wherein the on/off means comprises; one or more suspension layers; oneor more piezoelectric capacitors disposed at the suspension layers, andactuated with a piezoelectric characteristic by receiving an externalpower; and a contact electrode disposed at the suspension layers, andelectrically separated from the piezoelectric capacitors, wherein aground line is formed adjacent to the signal transmission line andelectrically connected to the signal transmission line by a connectionline.
 20. The RF MEMS switch of claim 19 wherein the suspension layerpositioned between the contact electrode and the piezoelectric capacitoris formed to have a wire type.
 21. The RF MEMS switch of claim 19,wherein the signal transmission line further comprises a connection pad.22. The RF MEMS switch of claim 21, wherein the signal transmission lineis electrically connected to the connection pad by a connection line.23. The RF MEMS switch of claim of claim 21, wherein the contactelectrode has one structure of Ti/Au/Mo, Cr/Au/Mo, Ti/Au/W, Cr/Au/W,Ti/Au/Ir and Cr/Au/Ir.
 24. The RF MEMS switch of claim 19 thepiezoelectric capacitor is composed of a first metal layer, apiezoelectric layer and a second metal layer, and the piezoelectriclayer is formed of Pb(Zr, Ti).
 25. The RF MEMS switch of claim 24,wherein a ratio between the Zr and Ti is 6:4.
 26. The RF MEMS switch ofclaim 19, wherein the contact electrode has a square shape or a diamondshape.
 27. The RF MEMS switch of claim 19, wherein the contact electrodeand the piezoelectric capacitor are formed on the same side of thesuspension layer.
 28. The RF MEMS switch of claim 19, wherein thecontact electrode is connected to the piezoelectric capacitor by thesuspension layer.
 29. The RF MEMS switch of claim 19 wherein thesuspension layer positioned between the contact electrode and thepiezoelectric capacitor has a width narrower than a wide of the otherposition.
 30. An RF MEMS switch, comprising: a signal transmission lineconstituted with a single signal transmission line for transmitting asignal; and an on/off means for turning on/off the signal transmissionline, wherein the on/off means comprises; one or more piezoelectriccapacitors actuated with a piezoelectric characteristic by receiving anexternal power; and a capacitor contact electrode connected with a firstmetal layer protruding from the piezoelectric capacitor, wherein aground line is formed adjacent to the transmission line and electricallyconnected to the transmission line by a connection line.
 31. The RF MEMSswitch of claim 30, wherein the capacitor contact electrode is connectedto the piezoelectric capacitor by the first metal layer of thepiezoelectric capacitor.
 32. The RF MEMS switch of claim 30 wherein thecapacitor contact electrode has a deposited structure composed of afirst metal layer, a dielectric layer and a second metal layer.
 33. TheRF MEMS switch of claim 30, wherein the capacitor contact electrode hasone structure of Ti/Au/Mo, Cr/Au/Mo, Ti/Au/W, Cr/Au/W, Ti/Au/Ir andCr/Au/Ir.
 34. The RF MEMS switch of claim 30 wherein the first metallayer poisoned between the capacitor contact electrode and thepiezoelectric capacitor has a width a narrower than a width of the otherposition.
 35. The RF MEMS switch of claim 30, wherein the first metallayer positioned between the capacitor contact electrode and thepiezoelectric capacitor is formed to have a wire type.
 36. The RF MEMSswitch of claim 30 wherein the signal transmission line furthercomprises a connection pad.
 37. The RF MEMS switch of claim 36, whereinthe signal transmission line is electrically connected to the connectionpad by a connection line.
 38. The RF MEMS switch of claim 30, whereinthe piezoelectric capacitor is composed of a first metal layer, apiezoelectric layer and a second metal layer, and the piezoelectriclayer is formed of Pb(Zr, Ti).
 39. The RF MEMS switch of claim 38,wherein a ratio between the Zr and Ti is 6:4.
 40. The RF MEMS switch ofclaim 30, wherein the capacitor contact electrode has a square shape ora diamond shape.
 41. An RF MEMS switch comprising: a signal transmissionline constituted with a single signal transmission line for transmittinga signal; and an on/off means for turning on/off the signal transmissionline for transmitting signal, wherein the on/off means comprise; one ormore suspension layers; one or more piezoelectric capacitors disposed atthe suspension layers, and actuated with a piezoelectric characteristicby receiving an external power; and a capacitor contact electrodedisposed at the suspension layers, and connected with a first metallayer protruding from the piezoelectric capacitor, wherein a ground lineis formed adjacent to the transmission line and electrically connectedto the transmission line by the connection line.
 42. The RF MEMS switchof claim 41, wherein the contact capacitor electrode has a square shapeor a diamond shape.
 43. The RF MEMS switch of claim 41, wherein thecapacitor contact electrode and the piezoelectric capacitor are formedon the same side of the suspension layer.
 44. The RF MEMS switch ofclaim 41, wherein the capacitor contact electrode is connected to thepiezoelectric capacitor by the first metal layer of the piezoelectriccapacitor and/or the suspension layer.
 45. The RF MEMS switch of claim41 wherein the first metal layer of the piezoelectric capacitor and/orthe suspension layer positioned between the capacitor contact electrodeand the piezoelectric capacitor have a width narrower than a width ofthe other position.
 46. The RF MEMS switch of claim 41, wherein thesignal transmission line further comprises a connection pad.
 47. The RFMEMS switch of claim 46 wherein the signal transmission line iselectrically connected to the connection pad by a connection line. 48.The RF MEMS switch of claim 47 wherein the capacitor contact electrodehas one structure of Ti/Au/Mo, Cr/Au/Mo, Ti/Au/W, Cr/Au/W, Ti/Au/Ir andCr/Au/Ir.
 49. The RF MEMS switch of claim 41 wherein the capacitorcontact electrode has a deposited structure composed of a first metallayer, a dielectric layer and a second metal layer, and thepiezoelectric capacitor is composed of a first metal layer, apiezoelectric layer and a second metal layer.
 50. The RF MEMS switch ofclaim 49 wherein the first metal layer of the piezoelectric capacitorand/or the suspension layer positioned between the capacitor contactelectrode and the piezoelectric capacitor are formed to have a wiretype.
 51. The RF MEMS switch of claim 49 wherein the piezoelectric layeris formed of Pb(Zr, Ti).
 52. The RF MEMS switch of claim 51, wherein aratio between the Zr and Ti is 6:4.
 53. An RF MEMS switch, comprising: acap substrate; a bottom substrate having a certain gap from the capsubstrate; a signal transmission line having a first signal transmissionline and a second signal transmission line electrically separated fromeach other for transmitting a signal, and disposed at the cap substrate;a connection line disposed at the cap substrate, and connected with thesignal transmission line; and an on/off means disposed at the bottomsubstrate, and turning on/off the signal transmission line fortransmitting signal, wherein the on/off means comprises; one or moresuspension layers disposed at the a bottom substrate; one or morepiezoelectric capacitors disposed at the suspension layers, and actuatedwith a piezoelectric characteristic by receiving an external power; anda contact electrode disposed at the suspension layers, and electricallyseparated from the piezoelectric capacitors, wherein a ground line isformed adjacent to the signal transmission line and electricallyconnected to the signal transmission line by the connection line. 54.The RF MEMS switch of claim 53 wherein the signal transmission line iselectrically connected to the connection pad by the connection line. 55.The RF MEMS switch of claim 53 wherein the contact electrode and thepiezoelectric capacitor are formed on the same side of the suspensionlayer.
 56. The RF MEMS switch of claim 53 wherein the contact electrodeis connected to the piezoelectric capacitor by the suspension layer. 57.The RF MEMS switch of claim 53, wherein the suspension layer positionedbetween the contact electrode and the piezoelectric capacitor has awidth narrower than a wide of the other position.
 58. The RF MEMS switchof claim 53 wherein the suspension layer positioned between the contactelectrode and the piezoelectric capacitor is formed to have a wire type.59. The RF MEMS switch of claim 53, wherein the connection line isexposed to outside through a via hole of the cap substrate.
 60. The RFMEMS switch of claim 53, wherein a solder bump is formed between the capsubstrate and the bottom substrate in order to maintain a certain gapbetween the cap substrate and the bottom substrate.
 61. The RF MEMSswitch of claim 53 wherein an organic bump is formed between the capsubstrate and the bottom substrate in order to maintain a certain gapbetween the cap substrate and the bottom substrate.
 62. The RF MEMSswitch of claim 53, wherein a groove is formed at a center part of thelower surface of the cap substrate.